cas 15968-37-3, 1,3,4,6-TETRAKIS(BUTOXYMETHYL)GLYCOLURIL, TECH. | Articles data ｜lookchem

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15968-37-3

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COATING COMPOSITION FOR USE WITH AN OVERCOATED PHOTORESIST
Organic coating compositions, particularly antireflective coating compositions for use with an overcoated photoresist, are provided that comprise that comprise a crosslinker component that comprises a structure of the following Formula (I):
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Paragraph 0102; 0103

(2017/03/21)

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Chemical Properties

Boiling Point: 585.3°Cat760mmHg
Flash Point:307.8°C
Density: 1.071g/cm³
Solubility:polar oganic solvents: soluble
Vapor Pressure: 1.1E-13mmHg at 25°C
Refractive Index: n20/D 1.4788(lit.)
PKA: -1.09±0.20(Predicted)
PSA: 84.02000
LogP: 3.96220

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