- Preparation method of bis(tert-butyl amino) silane
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The invention belongs to the field of chemical engineering, and particularly relates to a preparation method of bis(tert-butyl amino) silane. According to the method, dichlorosilane and tert-butyl amine are subjected to a de-acidification reaction in an organic solvent under the action of a functional catalyst to synthesize bis(tert-butyl amino) silane, and the preparation method is simple, high in raw material utilization rate, short in reaction time, high in product yield and high in product purity and can meet the use requirements of the electronic industry for silicon source substitutes.
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Paragraph 0018-0044
(2021/04/17)
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- N-ALKYL SUBSTITUTED CYCLIC AND OLIGOMERIC PERHYDRIDOSILAZANES, METHODS OF PREPARATION THEREOF, AND SILICON NITRIDE FILMS FORMED THEREFROM
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Novel N-alkyl substituted perhydridocyclic silazanes, oligomeric N-alkyl perhydridosilazane compounds, and N-alkylaminodihydridohalosilanes, and a method for their synthesis are provided. The novel compounds may be used to form high silicon nitride content films by thermal or plasma induced decomposition.
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Page/Page column 11
(2016/10/11)
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- Process for the production and purification of bis(tertiary-butylamino)silane
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A process for synthesizing an aminosilane compound such as bis(tertiarybutylamino)silane is provided. In one aspect of the present invention, there is provided a process for making bis(tertiarybutylamino)silane comprising reacting a stoichiometric excess
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