- Hexafluoro-isopropyl methacrylate and preparation method thereof
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The invention provides a preparation method of hexafluoro-isopropyl methacrylate. The preparation method comprises the following steps: adding 1 part of hexafluoro-isopropanol, 1.5-4 parts of an acid-binding agent and 2-4 parts of an organic solvent into a reaction bottle, and uniformly mixing; adding a polymerization inhibitor into the reaction bottle; dropwise adding 2-2.5 parts of methacryloyl chloride into the reaction bottle, and carrying out esterification reaction at a preset temperature; and after the reaction is finished, separating and purifying the reaction liquid to obtain hexafluoro-isopropyl methacrylate. The invention also provides hexafluoro-isopropyl methacrylate. According to the preparation method of hexafluoro-isopropyl methacrylate disclosed by the invention, a high-purity hexafluoro-isopropyl methacrylate product is obtained, and the purity of the product is greater than 99.5% and the metal ion impurity is less than 100 ppb through detection of an effective liquid chromatograph, so that the quality standard of the semiconductor industry is met.
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Paragraph 0037-0069
(2021/06/09)
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- PREPARATION OF (METH)ACRYLIC ACID ESTERS
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The invention relates to a method for preparation of (meth)acrylic acid esters from (meth)acrylic acid anhydrides.
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Page/Page column 15-16
(2020/03/05)
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