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Name	DICHLOROSILANE	EINECS	223-888-3
CAS No.	4109-96-0	Density	1,22 g/cm3
PSA	0.00000	LogP	0.46280
Solubility	decomposes	Melting Point	-122 °C(lit.)
Formula	Cl₂H₂Si	Boiling Point	8.3 °C at 760 mmHg
Molecular Weight	101.007	Flash Point	-37°C
Transport Information	UN 2189	Appearance	colourless gas
Safety	26-36/37/39-45	Risk Codes	12-14-23-34
Molecular Structure		Hazard Symbols	F+,T
Synonyms	Siliconchloridehydride;	Article Data	52

DICHLOROSILANE Synthetic route

: 7647-01-0
hydrogenchloride

: 7440-21-3
monosilane

: 4109-96-0
Dichlorosilane

Conditions

Conditions	Yield
In neat (no solvent) reaction at 100 °C for a longer period of time;;	79%
In neat (no solvent) reaction at 100 °C for a longer period of time;;	79%

: 931-70-4
(4-methylphenyl)silane

A: 13272-80-5
HSiCl2-p-CH3C6H4

B: 4109-96-0
Dichlorosilane

C: monochloro(p-tolyl)silane

Conditions

Conditions	Yield
With hydrogenchloride In diethyl ether at 60℃; for 19h; Temperature;	A 5% B 17% C 76%
With hydrogenchloride; diethyl ether In benzene-d6 at 80℃; Reagent/catalyst; Schlenk technique; Inert atmosphere;	A 16 %Spectr. B 36 %Spectr. C 40 %Spectr.

: 7647-01-0
hydrogenchloride

: 7440-21-3
monosilane

A: 13966-57-9
chlorosilane

B: 4109-96-0
Dichlorosilane

Conditions

Conditions	Yield
In diethyl ether at 60℃; for 20h;	A 73% B 27%
In diethyl ether at 80℃; for 42h;	A 34% B 66%

: 120578-34-9
(2,4,6-trimethylphenyl)silane

A: 13966-57-9
chlorosilane

B: 4109-96-0
Dichlorosilane

Conditions

Conditions	Yield
With hydrogenchloride In diethyl ether at 80℃; for 15h; Solvent; Temperature;	A 64% B 36%
With hydrogenchloride; diethyl ether In benzene-d6 at 80℃; for 15h; Reagent/catalyst; Schlenk technique; Inert atmosphere;	A 64 %Spectr. B 36 %Spectr.

: 18191-59-8
allylsilane

A: 13966-57-9
chlorosilane

B: 4109-96-0
Dichlorosilane

Conditions

Conditions	Yield
With hydrogenchloride In diethyl ether at 60℃; for 20h;	A 42% B 13%
With hydrogenchloride In diethyl ether at 80℃; for 42h;	A 20% B 33%
With hydrogenchloride; diethyl ether In benzene-d6 at 60℃; for 20h; Reagent/catalyst; Schlenk technique; Inert atmosphere;	A 42 %Spectr. B 13 %Spectr.
With hydrogenchloride; diethyl ether In benzene-d6 at 80℃; Reagent/catalyst; Schlenk technique; Inert atmosphere;	A 20 %Spectr. B 33 %Spectr.

: 10025-78-2
trichlorosilane

: 1333-74-0
hydrogen

A: 13966-57-9
chlorosilane

B: 4109-96-0
Dichlorosilane

Conditions

Conditions	Yield
With aluminium In neat (no solvent) passing a mixture of SiHCl3 and H2 (1:2) over Al at 350 °C;; separation by fractionated distillation;;	A 1-2 B 15%
With Al In neat (no solvent) passing a mixture of SiHCl3 and H2 (1:2) over Al at 350 °C;; separation by fractionated distillation;;	A 1-2 B 15%

: 10025-78-2
trichlorosilane

A: 13966-57-9
chlorosilane

B: 4109-96-0
Dichlorosilane

: 80-10-4
diphenylsilyl dichloride

A: 4109-96-0
Dichlorosilane

B: 98-13-5
Phenyltrichlorosilane

Conditions

Conditions	Yield
With hydrogenchloride; trichlorosilane; aluminium chloride
With trichlorosilane; aluminium chloride
With trichlorosilane; aluminium chloride

: 82146-27-8
dibromochlorosilane

: 1631-73-8
trimethylstannane

A: 13768-94-0
dibromosilane

B: 13966-57-9
chlorosilane

C: 4109-96-0
Dichlorosilane

Conditions

Conditions	Yield
In neat (no solvent) condensing of equimolar amts. of tinhydride and SiClHBr2 (trace of SiCl2HBr present) into cold finger, reaction at room temp. (30 min); further products; not isolated; IR spectroscopy;	A 0% B n/a C 0%

: 10025-78-2
trichlorosilane

: 1631-73-8
trimethylstannane

A: 1066-45-1
trimethyltin(IV)chloride

B: 7440-21-3
monosilane

C: 4109-96-0
Dichlorosilane

Conditions

Conditions	Yield
In neat (no solvent) inert atmosphere (N2, Ar or high vac.), room temperature, equimolar amts. of halosilane/tinhydride, reactn. time 12 h; not isolated; IR spectroscopy (identified 41% SiCl2H2 and 15% SiH4 in product mixt.);

DICHLOROSILANE Chemical Properties

Product Name: Dichlorosilane (CAS NO.4109-96-0)

Molecular Formula: C_l2H₂Si
Molecular Weight: 101.01g/mol
Mol File: 4109-96-0.mol
Einecs: 223-888-3
Melting Point: -122 °C(lit.)
Boiling point: 8.3 °C at 760 mmHg
Flash Point: -37°C
Density: 1,22 g/cm³
Water Solubility: Decomposes
Stability: Stable. Extremely flammable; note very wide explosion limits. Reacts violently with water, alcohols, strong oxidizing agents, bases.
Enthalpy of Vaporization: 25 kJ/mol
Vapour Pressure: 1360 mmHg at 25°C
Product Categories: Chemical Synthesis; Compressed and Liquefied GasesMicro/Nanoelectronics; Electronic Chemicals; Gases; Synthetic Reagents

DICHLOROSILANE Uses

Dichlorosilane (CAS NO.4109-96-0) is used in semiconductor manufacturing, especially the epitaxy process as the silicon source.It is also used in the electronics industry in the poly-silicon epitaxial growth, as well as chemical vapor deposition silicon dioxide and silicon nitride.

DICHLOROSILANE Toxicity Data With Reference

TOXIC; may be fatal if inhaled or absorbed through skin. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire will produce irritating, corrosive and/or toxic gases. Runoff from fire control may cause pollution.

Organism	Test Type	Route	Reported Dose (Normalized Dose)	Effect	Source
mouse	LC50	inhalation	144ppm/4H (144ppm)		Archives of Toxicology. Vol. 70, Pg. 218, 1996.
rat	LC50	inhalation	215ppm (215ppm)	SENSE ORGANS AND SPECIAL SENSES: LACRIMATION: EYE LUNGS, THORAX, OR RESPIRATION: ACUTE PULMONARY EDEMA LUNGS, THORAX, OR RESPIRATION: DYSPNEA	Journal of Toxicological Sciences. Vol. 18, Pg. 394, 1993.

DICHLOROSILANE Consensus Reports

Reported in EPA TSCA Inventory.

DICHLOROSILANE Safety Profile

Flammable; may be ignited by heat, sparks or flames. May form explosive mixtures with air. Vapors from liquefied gas are initially heavier than air and spread along ground. Vapors may travel to source of ignition and flash back. Some of these materials may react violently with water. Cylinders exposed to fire may vent and release toxic and flammable gas through pressure relief devices. Containers may explode when heated. Ruptured cylinders may rocket. Runoff may create fire or explosion hazard.
Safety Information of Dichlorosilane (CAS NO.4109-96-0):
Hazard Codes: F+,T
Risk Statements: 12-14-23-34
12: Extremely Flammable
14: Reacts violently with water
23: Toxic by inhalation
34: Causes burns
Safety Statements: 26-36/37/39-45
26: In case of contact with eyes, rinse immediately with plenty of water and seek medical advice
36: Wear suitable protective clothing
37: Wear suitable gloves
39: Wear eye/face protection
45: In case of accident or if you feel unwell, seek medical advice immediately (show label where possible)

DICHLOROSILANE Specification

Dichlorosilane ,its CAS NO. is 4109-96-0,the synonyms is Dichloro-silan ; Siliconchloridehydride .

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