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ACKNOWLEDGMENTS
The x-ray characterization by D. McCready and AES
assistance by A.S. Lea at the Environmental Molecular
Sciences Laboratory, a national scientific user facility
sponsored by the Department of Energy’s Office of
Biological and Environmental Research and located at
Pacific Northwest National Laboratory, is greatly appre-
ciated. Financial support was provided by DARPA Mi-
crosystems Technology Office (MTO’s) MicroPower
Generation Program and the U.S. Army Space and Mis-
sile Defense Command (SMDC) Contract No. DASG60-
02-C0001. Additional financial support was provided by
the National Science Foundation and the “XYZ on a
chip” program Grant No. 9980837. The authors would
like to thank K. Olsen and J. Skinner for performing
electromechanical characterization, D. Eakins for TEM
characterization, and T. Sullivan for ferroelectric testing.
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