117442-31-6

Basic information

• Product Name: trimethylethylammonium hydrogencarbonate
• Synonyms: trimethylethylammonium hydrogencarbonate
• CAS NO: 117442-31-6
• Molecular Weight: 149.19
• Mol File: 117442-31-6.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: trimethylethylammonium hydrogencarbonate(CAS DataBase Reference)
• NIST Chemistry Reference: trimethylethylammonium hydrogencarbonate(117442-31-6)
• EPA Substance Registry System: trimethylethylammonium hydrogencarbonate(117442-31-6)

Safety Data

• Hazardous Substances Data: 117442-31-6(Hazardous Substances Data)

Relevant articles and documents

Process for producing a high purity quaternary ammonium hydroxide

A process for production of high purity quaternary ammonium hydroxides, comprising electrolyzing quaternary ammonium hydrogencarbonates represented by the general formula: (wherein the symbols are as defined in the appended claims) in an electrolytic cell comprising an anode compartment and a cathode compartment defined by a cation exchange membrane. In accordance with this process, high purity quaternary ammonium hydroxides can be produced with high electrolytic efficiency and further without causing corrosion of equip-ment. Since the quaternary ammonium hydroxides produced by the present invention are of high purity, they can be effectively used as, for example, cleaners, etchants or developers for wafers in the production of IC and LSI in the field of electronics and semiconductors.