1214274-91-5

Basic information

• Product Name: C₂₀H₃₀F₄O₄
• Synonyms: C₂₀H₃₀F₄O₄
• CAS NO: 1214274-91-5
• Molecular Weight: 410.449
• Mol File: 1214274-91-5.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: C₂₀H₃₀F₄O₄(CAS DataBase Reference)
• NIST Chemistry Reference: C₂₀H₃₀F₄O₄(1214274-91-5)
• EPA Substance Registry System: C₂₀H₃₀F₄O₄(1214274-91-5)

Safety Data

• Hazardous Substances Data: 1214274-91-5(Hazardous Substances Data)

Upstream product

• 377-38-8 tetrafluorosuccinic acid 
• 1940-18-7 1-ethylcyclohexanol 
• 530-62-1 1,1'-carbonyldiimidazole 
• 699-30-9 perfluorosuccinic anhydride 

Relevant articles and documents

Compound, method for preparing the compound and resist composition containing the compound

A compounds represented by the Formula (I) or the Formula (I′). wherein Z1 and Z2 independently represent a hydrogen atom, a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group, provided that at least one of Z1 and Z2 represent a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group; rings Y1 and Y2 independently represents an optionally substituted C3 to C20 alicyclic hydrocarbon group; Q1 to Q4 and Q′1 to Q′4 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; and m and n independently represent an integer of 0 to 5.