17048-10-1

Basic information

• Product Name: TETRAKIS(DIETHYLAMINO)SILANE
• Synonyms: TETRAKIS(DIETHYLAMINO)SILANE;TETRAKIS (DIETHYLAMINO) SILICON;octaethylsilanetetramine;octaethyl-silanetetramin;Silanetetramine,octaethyl-;Einecs 241-115-8;Silanetetramine, N,N,N',N',N'',N'',N''',N'''-octaethyl-
• CAS NO: 17048-10-1
• Molecular Formula: C₁₆H₄₀N₄Si
• Molecular Weight: 316.6
• EINECS: 241-115-8
• Mol File: 17048-10-1.mol
• Article Data: 2

Chemical Properties

• Boiling Point: 344.4 °C at 760 mmHg
• Flash Point: 162.1 °C
• Appearance: /
• Density: 0.885 g/cm³
• Vapor Pressure: 6.61E-05mmHg at 25°C
• Refractive Index: 1.47
• CAS DataBase Reference: TETRAKIS(DIETHYLAMINO)SILANE(CAS DataBase Reference)
• NIST Chemistry Reference: TETRAKIS(DIETHYLAMINO)SILANE(17048-10-1)
• EPA Substance Registry System: TETRAKIS(DIETHYLAMINO)SILANE(17048-10-1)

Safety Data

• Hazardous Substances Data: 17048-10-1(Hazardous Substances Data)

Usage

General Description

Tetrakis(diethylamino)silane is a chemical compound with the molecular formula Si(N(C2H5)2)4. It is a colorless and highly viscous liquid with a faint odor. Tetrakis(diethylamino)silane is primarily used as a precursor in the production of amorphous silicon nitride and silicon carbonitride thin films, which have applications in the microelectronics and semiconductor industries. It is also used as a reagent in the synthesis of silicon-containing polymers and as a surface treatment agent for improving adhesion properties of coatings. Additionally, tetrakis(diethylamino)silane is a recommended alternative to tetraethyl orthosilicate for producing silicon dioxide films. Due to its flammable and reactive nature, proper handling and storage precautions are necessary when working with tetrakis(diethylamino)silane.

InChI:InChI=1/C16H40N4Si/c1-9-17(10-2)21(18(11-3)12-4,19(13-5)14-6)20(15-7)16-8/h9-16H2,1-8H3

Upstream product

• 109-89-7 diethylamine 

Relevant articles and documents

Synthesis of tetrakis(dialkylamino)silanes

A method of synthesizing a substantially pure homoleptic tetrakis secondary amine derivative of silicon, said derivative being substantially free of halogen and having the formula: [in-line-formulae]Si(NRR1)4 [/in-line-formulae]wherein: R and R1 are the same or different and are substituted or unsubstituted straight or branched chain alkyl, groups having from 1 to 6 carbon atoms, said method comprising reacting a silicon halide having the formula: [in-line-formulae]SiX4 [/in-line-formulae]wherein: X is bromine or iodine, with an excess of a secondary amine having the formula: [in-line-formulae]HNRR1 [/in-line-formulae]wherein: R and R1 are as defined as above, for a time and under conditions sufficient to produce a reaction product mixture containing the desired product, Si(NRR1)4.