19962-11-9 Usage
General Description
Tetrakis(dimethylamino)hafnium, also known as TDMAH, is a chemical compound often used as a precursor in the fabrication of metal-organic chemical vapor deposition (MOCVD) films for electronic and semiconductor applications. It is a colorless liquid with a high vapor pressure, making it easy to handle and useful for thin film deposition processes. TDMAH is considered a key chemical in the production of hafnium-based thin films used in the manufacturing of microelectronics, including integrated circuits and thin film transistors. Additionally, it is important for the growth of high-k dielectric films for advanced semiconductor devices, offering a crucial role in the development of next-generation electronics and computer technologies.
Check Digit Verification of cas no
The CAS Registry Mumber 19962-11-9 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 1,9,9,6 and 2 respectively; the second part has 2 digits, 1 and 1 respectively.
Calculate Digit Verification of CAS Registry Number 19962-11:
(7*1)+(6*9)+(5*9)+(4*6)+(3*2)+(2*1)+(1*1)=139
139 % 10 = 9
So 19962-11-9 is a valid CAS Registry Number.
19962-11-9Relevant articles and documents
Organometallic compound, its synthesis method, and solution raw material and metal-containing thin film containing the same
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Page 6, (2008/06/13)
The organometallic compound of the present invention is a compound that has bonds between metal atoms and nitrogen atoms or bonds between semimetal atoms and nitrogen atoms, and the content of chlorine in the compound is 200 ppm or less and the content of water is 30 ppm or less. In addition, the general formula of this compound is represented by the following formula (1): M[(R1)2N](n?s)(R2)s??(1) wherein, M represents a metal atom or semimetal atom, with the metal atom being Hf, Zr, Ta, Ti, Ce, Al, V, La, Nb or Ni, and the semimetal atom being Si, R1 represents a methyl group or ethyl group, R2 represents an ethyl group, n represents the valence of M, and s represents an integer of 0 to n?1.
