20213-75-6Relevant articles and documents
METHOD FOR PRODUCING DIALKYLAMINOSILANE
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Paragraph 0076-0078, (2020/05/06)
A method for safely and efficiently producing high-purity dialkylaminosilane. Dialkylamine is fed simultaneously during feeding chlorosilane in the presence of metal to cause reaction. For example, chlorosilane and dialkylamine are fed, and then only dialkylamine is fed to cause reaction, whereby dialkylaminosilane is produced.