25330-21-6Relevant articles and documents
Degradable photoresist resin monomer synthesized from 10-O-acetyl isocalamendiol and synthesis method of degradable photoresist resin monomer
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Paragraph 0022-0024; 0027-0029; 0032-0034; 0036-0038, (2020/10/04)
The invention discloses a degradable photoresist resin monomer synthesized from 10-O-acetyl isocalamendiol and a synthesis method of the degradable photoresist resin monomer. The invention relates tothe field of photoresist resin monomers. The structural formula is shown in the specification, wherein R is hydrogen or methyl. The synthesis method comprises the steps: hydrolyzing an ester group in10-O-acetyl isocalamendiol I, and then adjusting the system to be acidic to obtain an intermediate II; under the catalysis of a catalyst a, carrying out addition reaction on unsaturated carbon-carbondouble bonds of the intermediate II and hydrogen to obtain an intermediate III; and carrying out esterification reaction on the intermediate III and another reaction substrate to generate a target resin monomer IV. The novel photoresist resin monomer provided by the invention has better etching resistance, improves the etching resistance, improves the solubility of the exposed resin in a developing solution, is beneficial to improving the edge roughness of a developed pattern, and greatly improves the resolution of the developed pattern.