258872-14-9

Basic information

• Product Name: bis-(4-cyclohexylphenyl) iodonium nonafluorobutane sulfonate
• Synonyms: bis-(4-cyclohexylphenyl) iodonium nonafluorobutane sulfonate
• CAS NO: 258872-14-9
• Molecular Weight: 744.501
• Mol File: 258872-14-9.mol
• Article Data: 1

Chemical Properties

• CAS DataBase Reference: bis-(4-cyclohexylphenyl) iodonium nonafluorobutane sulfonate(CAS DataBase Reference)
• NIST Chemistry Reference: bis-(4-cyclohexylphenyl) iodonium nonafluorobutane sulfonate(258872-14-9)
• EPA Substance Registry System: bis-(4-cyclohexylphenyl) iodonium nonafluorobutane sulfonate(258872-14-9)

Safety Data

• Hazardous Substances Data: 258872-14-9(Hazardous Substances Data)

Upstream product

• 827-52-1 1-phenyl-1-cyclohexane 
• 75-59-2 tetramethyl ammoniumhydroxide 

Relevant articles and documents

RADIATION-SENSITIVE COMPOSITION OF CHEMICAL AMPLIFICATION TYPE

A chemically amplified radiation sensitive composition is provided which comprises a film forming hydroxystyrene based resin in combination with an onium salt precursor which generates a fluorinated alkanesulfonic acid as a photoacid generator. This composition can realize neither corrosion of apparatuses by outgas, nor T-shaped pattern profiles, nor change in linewidth attributable to process time delay, on the other side, high sensitivity and resolution, and good pattern profiles and stability thereof.