64916-48-9 Usage
Description
Palladium(II) hexafluoroacetylacetonate, also known as Pd(HFAA)2, is a chemical compound with the formula Pd(C5F7O2)2. It is a crystalline solid that exhibits unique chemical properties and is widely utilized in various industrial applications due to its catalytic activity.
Uses
Used in Chemical Vapor Deposition (CVD) Alloying Technology:
Palladium(II) hexafluoroacetylacetonate is used as a catalyst in the redox transmetalation reaction for enhancing CVD alloying technology for copper. It plays a crucial role in the formation of copper-based alloys, which are essential in the semiconductor and electronics industries.
Used in Ultra Large-Scale Integrated (ULSI) Devices:
Palladium(II) hexafluoroacetylacetonate is also employed in the simultaneous etching of copper and deposition of palladium for applications in ULSI devices. This process is vital for the manufacturing of advanced microelectronic components and circuits, contributing to the development of more efficient and powerful electronic devices.
Used in the Electronics Industry:
Palladium(II) hexafluoroacetylacetonate is used as a catalyst for the etching and deposition processes in the electronics industry. Its application reason is to facilitate the production of high-quality copper-based alloys and improve the performance of microelectronic components.
Used in the Semiconductor Industry:
In the semiconductor industry, Palladium(II) hexafluoroacetylacetonate is used as a catalyst to enhance the CVD alloying technology for copper. The application reason is to enable the creation of advanced copper-based alloys that are essential for the development of high-performance semiconductor devices.
Check Digit Verification of cas no
The CAS Registry Mumber 64916-48-9 includes 8 digits separated into 3 groups by hyphens. The first part of the number,starting from the left, has 5 digits, 6,4,9,1 and 6 respectively; the second part has 2 digits, 4 and 8 respectively.
Calculate Digit Verification of CAS Registry Number 64916-48:
(7*6)+(6*4)+(5*9)+(4*1)+(3*6)+(2*4)+(1*8)=149
149 % 10 = 9
So 64916-48-9 is a valid CAS Registry Number.
InChI:InChI=1/2C5H2F6O2.Pd/c2*6-4(7,8)2(12)1-3(13)5(9,10)11;/h2*1,12H;/q;;+2/p-2/b2*2-1-;
