66003-78-9Relevant articles and documents
Photoacid generator for 193 nm immersion lithography and intermediate thereof
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Paragraph 0101; 0109; 0112-0113; 0132-0134, (2021/11/27)
The invention discloses a photoacid generator for 193 nm immersed lithography and an intermediate thereof. The photoacid generator of the present invention is shown in Formula I. The photoresist containing the photoacid generator of the present invention has a high resolution. The method has the advantages of high sensitivity and low line width roughness, and has a good application prospect.
Switchable Synthesis of Aryl Sulfones and Sulfoxides through Solvent-Promoted Oxidation of Sulfides with O2/Air
Cheng, Zhen,Sun, Pengchao,Tang, Ailing,Jin, Weiwei,Liu, Chenjiang
, p. 8925 - 8929 (2019/11/14)
A practical and switchable method for the synthesis of aryl sulfones and sulfoxides via sulfide oxidation was developed. The chemoselectivities of products were simply controlled by reaction temperature using O2/air as the terminal oxidant and oxygen source. The broad substrate scope, easy realization of gram-scale production, and the simplification of a sulfide oxidation system render the strategy attractive and valuable.
Salt, the composition and production of resist pattern
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Paragraph 0198, (2018/03/23)
PROBLEM TO BE SOLVED: To provide a salt to be used for a resist composition that allows production of a resist pattern with good line edge roughness.SOLUTION: The salt is expressed by the formula (I). In the formula, Qand Qrepresent a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms; Lrepresents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms; Yrepresents a group expressed by the formula (Iy); R' represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms which may have a fluorine atom, or a hydroxyl group; X' represents a single bond, -O-, *-CO-O-, or the like; Ar represents a phenylene group; Rand Rrepresent an aliphatic hydrocarbon group having 1 to 10 carbon atoms which may have a substituent, an alicyclic hydrocarbon group having 4 to 36 carbon atoms which may have a substituent, an aromatic hydrocarbon group having 6 to 36 carbon atoms which may have a substituent, or a heterocyclic group having 6 to 36 carbon atoms which may have a substituent; and Lrepresents a divalent hydrocarbon group having 1 to 36 carbon atoms which may have a substituent.