926925-07-7Relevant articles and documents
Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition
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Page/Page column 105-106, (2009/01/23)
A compound which generates a sulfonic acid having one or more —SO3H groups and one or more —SO2— bonds upon irradiation with an actinic ray or a radiation; a photosensitive composition containing the compound; and a method of pattern formation with the photosensitive composition.