942619-42-3

Basic information

• Product Name: C₂HF₂O₅S^(1-)*C₁₈H₁₅S⁽¹⁺⁾
• Synonyms: C₂HF₂O₅S^(1-)*C₁₈H₁₅S⁽¹⁺⁾
• CAS NO: 942619-42-3
• Molecular Weight: 438.473
• Mol File: 942619-42-3.mol
• Article Data: 3

Chemical Properties

• CAS DataBase Reference: C₂HF₂O₅S^(1-)*C₁₈H₁₅S⁽¹⁺⁾(CAS DataBase Reference)
• NIST Chemistry Reference: C₂HF₂O₅S^(1-)*C₁₈H₁₅S⁽¹⁺⁾(942619-42-3)
• EPA Substance Registry System: C₂HF₂O₅S^(1-)*C₁₈H₁₅S⁽¹⁺⁾(942619-42-3)

Safety Data

• Hazardous Substances Data: 942619-42-3(Hazardous Substances Data)

Upstream product

• 912289-98-6 difluorosulfoacetic acid sodium salt 
• 4270-70-6 triphenylsulfonium chloride 

Relevant articles and documents

SALT, PHOTORESIST COMPOSITION, AND METHOD FOR PRODUCING PHOTORESIST PATTERN

A salt represented by formula (I): wherein Q1 and Q2 independently each represent a fluorine atom or a C1-C6 perfluoroalkyl group, L1 represents a C1-C17 divalent saturated hydrocarbon group in which a methylene group may

Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same

The present invention provides a salt represented by the formula (I): wherein X represents a C3-C30 divalent group containing at least one divalent alicyclic hydrocarbon group, and at least one —CH2— in the C3-C30 divalent group may be substituted with —O— or —CO—, Y represents a C3-C30 cyclic hydrocarbon group which may be substituted with at least one group selected from a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group and a cyano group, and at least one —CH2— in the C3-C30 cyclic hydrocarbon group may be substituted with —O— or —CO—, Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, and A+ represents an organic counter ion.