Material Safety Data Sheet
Trimethylsilane

Section 1. Chemical product and company identification
: Trimethylsilane
Product Name
: AIRGAS INC., on behalf of its subsidiaries
Supplier
259 North Radnor-Chester Road
Suite 100
Radnor, PA 19087-5283
1-610-687-5253
: Synthetic/Analytical chemistry.
Product use
: 001107
MSDS#
Date of : 8/17/2006.
Preparation/Revision
: 1-866-734-3438
In case of emergency

Section 2. Hazards identification
: Gas.
Physical state
: Warning!
Emergency overview
FLAMMABLE GAS.
CONTENTS UNDER PRESSURE.
CAUSES DAMAGE TO THE FOLLOWING ORGANS: RESPIRATORY TRACT, SKIN,
EYES.
VAPOR MAY CAUSE FLASH FIRE.
Keep away from heat, sparks and flame. Do not puncture or incinerate container. Keep
container closed. Use only with adequate ventilation.
Contact with rapidly expanding gases can cause frostbite.
: Inhalation
Routes of entry
Potential acute health effects
Irritating to eyes.
Eyes :
Irritating to skin.
Skin :
Irritating to respiratory system. Harmful by inhalation.
Inhalation :
Ingestion is not a normal route of exposure for gases
:
Ingestion
CARCINOGENIC EFFECTS Not available.
:
Potential chronic health :
MUTAGENIC EFFECTS Not available.
:
effects
TERATOGENIC EFFECTS Not available.
:
: Acute or chronic respiratory conditions may be aggravated by overexposure to this gas.
Medical conditions
aggravated by overexposure
See toxicological Information (section 11)

Section 3. Composition, Information on Ingredients
Name CAS number % Volume Exposure limits
Trimethylsilane 993-07-7 100

Section 4. First aid measures
No action shall be taken involving any personal risk or without suitable training.If fumes are still suspected to be present,
the rescuer should wear an appropriate mask or a self-contained breathing apparatus.It may be dangerous to the person
providing aid to give mouth-to-mouth resuscitation.
: In case of contact, immediately flush eyes with plenty of water for at least 15 minutes.
Eye contact
Get medical attention if irritation occurs.
: In case of contact, immediately flush skin with plenty of water. Remove contaminated
Skin contact
clothing and shoes. Wash clothing before reuse. Thoroughly clean shoes before reuse.
Get medical attention.
: Try to warm up the frozen tissues and seek medical attention.
Frostbite
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: If inhaled, remove to fresh air. If not breathing, give artificial respiration. If breathing is
Inhalation
difficult, give oxygen. Get medical attention if symptoms appear.
: Do NOT induce vomiting unless directed to do so by medical personnel. Never give
Ingestion
anything by mouth to an unconscious person. Get medical attention if symptoms
appear.

Section 5. Fire fighting measures
Flammable.
Flammability of the product :
320??C (608??F)
Auto-ignition temperature :
Lower: 1.3% Upper: 44%
Flammable limits :
These products are carbon oxides (CO, CO 2). Some metallic oxides.
Products of combustion :
In case of fire, use water spray (fog), foam, dry chemicals, or CO 2.
Fire fighting media and :
instructions
If involved in fire, shut off flow immediately if it can be done without risk. Apply water
from a safe distance to cool container and protect surrounding area.
Extremely flammable. Gas may accumulate in confined areas, travel considerable
distance to source of ignition and flash back causing fire or explosion.
: Fire fighters should wear appropriate protective equipment and self-contained breathing
Special protective
apparatus (SCBA) with a full facepiece operated in positive pressure mode.
equipment for fire-fighters

Section 6. Accidental release measures
: Immediately contact emergency personnel. Keep unnecessary personnel away. Use
Personal precautions
suitable protective equipment (Section 8). Shut off gas supply if this can be done safely.
Isolate area until gas has dispersed.
Environmental precautions : Avoid dispersal of spilled material and runoff and contact with soil, waterways, drains
and sewers.

Section 7. Handling and storage
: Keep container closed. Use only with adequate ventilation. Keep away from heat,
Handling
sparks and flame. To avoid fire, minimize ignition sources. Use explosion-proof
electrical (ventilating, lighting and material handling) equipment. Do not puncture or
incinerate container. High pressure gas. Use equipment rated for cylinder pressure.
Close valve after each use and when empty. Protect cylinders from physical damage; do
not drag, roll, slide, or drop. Use a suitable hand truck for cylinder movement.
: Keep container tightly closed. Keep container in a cool, well-ventilated area. Cylinders
Storage
should be stored upright, with valve protection cap in place, and firmly secured to
prevent falling or being knocked over. Cylinder temperatures should not exceed 52 ??C
(125 ??F).

Section 8. Exposure Controls, Personal Protection
: Use only with adequate ventilation. Use process enclosures, local exhaust ventilation, or
Engineering controls
other engineering controls to keep airborne levels below recommended exposure limits.
The engineering controls also need to keep gas, vapor or dust concentrations below any
explosive limits. Use explosion-proof ventilation equipment.
Personal protection
: Safety eyewear complying with an approved standard should be used when a risk
Eyes
assessment indicates this is necessary to avoid exposure to liquid splashes, mists or
dusts.
: Personal protective equipment for the body should be selected based on the task being
Skin
performed and the risks involved and should be approved by a specialist before handling
this product.
: Use a properly fitted, air-purifying or air-fed respirator complying with an approved
Respiratory
standard if a risk assessment indicates this is necessary.Respirator selection must be
based on known or anticipated exposure levels, the hazards of the product and the safe
working limits of the selected respirator.
The applicable standards are (US) 29 CFR 1910.134 and (Canada) Z94.4-93
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: Chemical-resistant, impervious gloves or gauntlets complying with an approved standard
Hands
should be worn at all times when handling chemical products if a risk assessment
indicates this is necessary.
Personal protection in case : A self-contained breathing apparatus should be used to avoid inhalation of the product.
of a large spill
Consult local authorities for acceptable exposure limits.

Section 9. Physical and chemical properties
74.2 g/mole
Molecular weight :
C3-H10-Si
Molecular formula :
6.7??C (44.1??F)
Boiling/condensation point :
-135.9??C (-212.6??F)
Melting/freezing point :
Not available.
Critical temperature :
Not available.
Vapor density :
Specific Volume (ft3/lb) 1.5674
:
Gas Density (lb/ft3) 0.638
:

Section 10. Stability and reactivity
: The product is stable.
Stability and reactivity
Incompatibility with various : Highly reactive with oxidizing agents, acids, alkalis.
substances

Section 11. Toxicological information
Ingredient name Test Result Route Species
Trimethylsilane LC50 >5000 ppm (1 Inhalation Rat
hour(s))
Chronic effects on humans : Causes damage to the following organs: upper respiratory tract, skin, eyes.

: No specific information is available in our database regarding the other toxic effects of
Other toxic effects on
this material for humans.
humans
Specific effects
: No known significant effects or critical hazards.
Carcinogenic effects
: No known significant effects or critical hazards.
Mutagenic effects
: No known significant effects or critical hazards.
Reproduction toxicity

Section 12. Ecological information
: These products are carbon oxides (CO, CO 2) and water. Some metallic oxides.
Products of degradation
: The products of degradation are less toxic than the product itself.
Toxicity of the products of
biodegradation
: Not available.
Environmental fate
: No known significant effects or critical hazards.
Environmental hazards
: Not available.
Toxicity to the environment

Section 13. Disposal considerations
Product removed from the cylinder must be disposed of in accordance with appropriate Federal, State, local
regulation.Return cylinders with residual product to Airgas, Inc.Do not dispose of locally.




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Section 14. Transport information
Regulatory UN number Proper shipping Class Packing group Label Additional
information name information

DOT Classification UN3161 Liquefied gas, 2.1 Not applicable (gas). -
flammable, n.o.s. FLAMMABLE GAS

(silane, trimethyl-) 2




TDG Classification UN3161 Liquefied gas, 2.1 Not applicable (gas). Explosive
flammable, n.o.s. Limit and
(silane, trimethyl-) Limited
2

Quantity
Index
0.125

ERAP Index
3000

Passenger
Carrying Ship
Index
Forbidden

Passenger
Carrying
Road or Rail
Index
Forbidden
UN3161 Liquefied gas, 2.1 Not applicable (gas). -
Mexico
flammable, n.o.s.
Classification FLAMMABLE GAS

(silane, trimethyl-) 2




Section 15. Regulatory information
United States
: TSCA 8(b) inventory: silane, trimethyl-
U.S. Federal regulations
SARA 302/304/311/312 extremely hazardous substances: No products were found.
SARA 302/304 emergency planning and notification: No products were found.
SARA 302/304/311/312 hazardous chemicals: No products were found.
SARA 311/312 MSDS distribution - chemical inventory - hazard identification: No
products were found.
Clean Water Act (CWA) 307: No products were found.
Clean Water Act (CWA) 311: No products were found.
Clean air act (CAA) 112 accidental release prevention: No products were found.
Clean air act (CAA) 112 regulated flammable substances: No products were found.
Clean air act (CAA) 112 regulated toxic substances: No products were found.
: No products were found.
State regulations
Canada
: Class A: Compressed gas.
WHMIS (Canada)
Class B-1: Flammable gas.
CEPA NDSL: silane, trimethyl-




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Section 16. Other information
United States
: FLAMMABLE GAS.
Label Requirements
CONTENTS UNDER PRESSURE.
CAUSES DAMAGE TO THE FOLLOWING ORGANS: RESPIRATORY TRACT, SKIN,
EYES.
VAPOR MAY CAUSE FLASH FIRE.
Canada
: Class A: Compressed gas.
Label Requirements
Class B-1: Flammable gas.
* 2
Hazardous Material : Health
Information System (U.S.A.)
4
Fire hazard
1
Reactivity
C
Personal protection

National Fire Protection :
Flammability
4
Association (U.S.A.)
2 1
Health Instability
Special


Notice to reader
To the best of our knowledge, the information contained herein is accurate. However, neither the above named
supplier nor any of its subsidiaries assumes any liability whatsoever for the accuracy or completeness of the
information contained herein.
Final determination of suitability of any material is the sole responsibility of the user. All materials may present
unknown hazards and should be used with caution. Although certain hazards are described herein, we cannot
guarantee that these are the only hazards that exist.




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TRIMETHYLSILANE