Depth profile of mechanical properties of plasma-polymerized TETRAVINYLSILANE (cas 1112-55-6) films evaluated by cyclic nanoindentation

Add time:08/17/2019    Source:sciencedirect.com

Plasma-polymerized TETRAVINYLSILANE (cas 1112-55-6) films deposited on silicon wafers by PECVD at different powers using pulsed plasma were analyzed by both typical conventional depth sensing and by cyclic nanoindentation. A comparative study of the two methods was carried out under reduced system drift. It was found that cyclic nanoindentation is a reproducible technique enabling reliable construction of the depth profile of mechanical properties to the same degree of accuracy as conventional nanoindentation but considerably faster. The Young's modulus (7.9–17 GPa) and hardness (0.69–3.0 GPa) of films were controlled by the effective power (0.1–10 W). Conditions for appropriate depth analysis of mechanical properties at shallow depth and the limited applicability of the 10% rule are also discussed.

We also recommend Trading Suppliers and Manufacturers of TETRAVINYLSILANE (cas 1112-55-6). Pls Click Website Link as below: cas 1112-55-6 suppliers

Prev:Physico-chemical properties of plasma-polymerized TETRAVINYLSILANE (cas 1112-55-6)
Next:Hexacarbonyl(TETRAVINYLSILANE (cas 1112-55-6))diron)