- Chemical Name:trichloro(fluoro)silane
- CAS No.:14965-52-7
- Molecular Formula:Cl3 F Si
- Molecular Weight:153.443
- Hs Code.:
- DSSTox Substance ID:DTXSID30164361
- Nikkaji Number:J95.219B
- Wikipedia:Trichlorofluorosilane
- Wikidata:Q1032320
- Mol file:14965-52-7.mol
Synonyms:Fluorotrichlorosilane; Silicon trichloridefluoride; Trichlorofluorosilane