Technology Process of difluorosilane
There total 11 articles about difluorosilane which
guide to synthetic route it.
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synthetic route:
- Guidance literature:
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In
neat (no solvent, gas phase);
F2 is adsorbed to Si at 120 K up to the desired coverages, and the surface is heated at a constant rate of 4 K/s. Product is desorbed at 400-800 K, depending on coverage.;
Kinetics;
DOI:10.1016/0039-6028(89)90271-9
- Guidance literature:
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In
solid matrix;
byproducts: SiHD3; Irradiation (UV/VIS); dilg. SiD4 with Ar (various ratios); codeposition with F2 dild. with Ar (various ratios) on a substrate at 13.+-1. K; UV-photolysis (220-1000 nm) for 1 h; annealing to 25.+-.2 K;; not isolated, identified by IR-spectroscopy; further products;;
DOI:10.1021/j100192a020
- Guidance literature:
-
In
solid matrix;
byproducts: HF, H2O, O2F; Irradiation (UV/VIS); dilg. SiH4 with Ar (various ratios); codeposition with F2 dild. with Ar (various ratios) on a substrate at 13.+-1. K; UV-photolysis (220-1000 nm) for 1 h; annealing to 25.+-.2 K;; not isolated, identified by IR-spectroscopy; further products;;
DOI:10.1021/j100192a020