646-97-9Relevant articles and documents
Gordon
, p. 1357 (1970)
Precursors to fluoroalkanol-containing olefin monomers and associated methods of synthesis and use
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Page/Page column 13, (2008/06/13)
The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.