Nanostructured HAFNIUM OXIDE (cas 12055-23-1) Thin films for Sensing Carbon Monoxide: An Experimental Investigation

Add time:07/28/2019    Source:sciencedirect.com

Carbon monoxide (CO) is a pollutant with potential to harm all living things. The main source of CO is vehicle emissions, burn agriculture and industrial activities. Although carbon monoxide is only a weak greenhouse gas, its influence on climate goes beyond its own direct effects. Its presence affects concentrations of other greenhouse gases including methane, tropospheric ozone and carbon dioxide. In this paper, we are reporting the CO sensing properties of HAFNIUM OXIDE (cas 12055-23-1) thin films. The thin films of HfO2 were deposited on glass substrates using DC magnetron sputtering technique at four different temperatures. The structural, morphological, optical and electrical properties were investigated using XRD, AFM, UV-vis NIR spectrophotometer and electrical unit respectively. The crystalline nature of the film increases with the temperature. It was also found that the sensitivity of the films increases with CO concentration while it decreases with the deposition temperature. The factor responsible for this phenomenon was the porosity of the film calculated from packing density.

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