Comparison studies of InGaN epitaxy with trimethylgallium and TRIETHYLGALLIUM (cas 1115-99-7) for photosensors application
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Add time:08/17/2019 Source:sciencedirect.com
InGaN materials grown by metalorganic chemical vapor deposition (MOCVD) using trimethylgallium (TMG) and TRIETHYLGALLIUM (cas 1115-99-7) (TEG) as alkyl source were compared. Ga-doped ZnO (GZO) films using radio frequency (RF) magnetron sputtering to feature Schottky contacts onto InGaN epitaxial layer with AlN or Mg-doped GaN in-situ capping layer were demonstrated. It is of great potential in application to high performance InGaN photosensors.
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