The thermal decomposition of TRIETHYLGALLIUM (cas 1115-99-7) on GaAs(100)
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Add time:08/19/2019 Source:sciencedirect.com
The adsorption and thermal decomposition of TRIETHYLGALLIUM (cas 1115-99-7) (TEG) on GaAs has been studied using thermal desorption and XPS techniques. Pure Ga films are deposited when adsorbed TEG layers on GaAs are heated in a reaction which competes with TEG and diethylgallium (DEG) desorption. Ethene, ethene and hydrogen are detected as the decomposition products of the overall cracking reaction.
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