?CF3+R3SiH→CF3R3Si?CF? + R?SiH \rightarrow CF?R?Si?CF3?+R3?SiH→CF3?R3?Si 3CH2+R3SiH→3CHR3Si3CH? + R?SiH \rightarrow 3CHR?Si3CH2?+R3?SiH→3CHR3?Si
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